Products > Semiconductor > PX-Series Plasma Treatment System
PX-Series Bench top Plasma Treatment System
The PX-Series control module monitors and controls the vacuum and gas flow, chamber pressure, and power level. Up to four mass controllers are connected to a gas-mixing manifold to provide process recipe flexibility.
The microprocessor provides automatic operation, is user friendly, and ensures precise, reproducible process conditions. Cycle duration is controlled by elapsed time and can be downloaded to a PC for further analysis.
Power and Matching Network
Different applications require different configurations and
power densities. The PX-Series system is equipped with an
automatic impedance matching network for ease of operation
and consistent results. RF power supplies are available in
either 300 or 600 watts depending on application requirements.
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PX-Series Data Sheet
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>