Products > Semiconductor > FlexTRAK-WR™ Plasma Treatment System
FlexTRAK-WR™ Plasma Treatment System
The FlexTRAK-WR system is designed for high-throughput processing of semiconductor wafers up to 300mm (12 in.). The patented plasma chamber design provides exceptional etch uniformity and process repeatability. Its three-axis symmetrical chamber ensures all areas of the wafer are treated uniformly, while tight control over all process parameters ensures highly repeatable results.
HIGH-THROUGHPUT PROCESSING
FlexTRAK-WR system’s integrated semiconductor wafer
handling system provides rapid material transfer for a wide
range of wafer sizes, up to 300mm (12 in.). Processing can
be done from most types of wafer cassettes and front opening
unified pods (FOUP). The patented chamber design and
control architecture enables short plasma cycle times with
very low overhead, ensuring that throughput for your application
is maximized and cost of ownership is minimized.
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FlexTRAK-WR™ Data Sheet
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>